Nanopositioning Technologies

Nanopositioning Technologies

Fundamentals and Applications

Sun, Yu; Liu, Xinyu; Ru, Changhai

Springer International Publishing AG

03/2018

409

Mole

Inglês

9783319795393

15 a 20 dias

635

Descrição não disponível.
1.A review of Stick-Slip Nanopositioning Actuators.- 2. Piezoelectric Motor Technology - A Review.- 3.Design of High-speed Nanopositioning Systems.- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism.- 5.Electro-magnetic Nano Positioning.- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis.- 7. Tracking Control for Nanopositioning.- 8.Position Sensors for Nanopositioning.- 9. MEMS Nanopositioners.- 10.Control Issues of MEMS nanopositioning devices.- 11. A Review of Nanomanipulation in Scanning Electron Microscopes.- 12. Nanopositioning for lithography and data storage.
Este título pertence ao(s) assunto(s) indicados(s). Para ver outros títulos clique no assunto desejado.
Flexure-Guided Nanopositioning;MEMS Nanopositioning;Nanomanipulation;Nanopositioning Applications;Nanopositoning Technologies;Nanopostioning;Piezoelectric Actuation;Piezoelectric Nanopositioning;Tracking Control for Nanopositioning